18 August 1997 Laser beam removal of microstructures with Nd:YAG lasers
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Proceedings Volume 3097, Lasers in Material Processing; (1997) https://doi.org/10.1117/12.281085
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany
Abstract
Laser beam removal with Nd:YAG-lasers is a manufacturing method to produce micro-structures with the precision of a few micrometers. Because many materials can be structured with laser radiation, especially hard metals and ceramics, it is a very flexible technology for the production of tools for micro-embossing and micro-stamping. The combination of the laser and stamping technology offers the possibility to produce high quantities of micro-parts at moderate costs. A system for laser beam removal, existing of a handling with a CAD/CAM coupling and a diode pumped solid state laser was developed and in several investigations the quality of these micro-tools was tested.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dirk Hellrung, Dirk Hellrung, Arnold Gillner, Arnold Gillner, Reinhart Poprawe, Reinhart Poprawe, } "Laser beam removal of microstructures with Nd:YAG lasers", Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); doi: 10.1117/12.281085; https://doi.org/10.1117/12.281085
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