18 August 1997 Laser cleaning of microparticles: theoretical prediction of threshold laser fluence
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Proceedings Volume 3097, Lasers in Material Processing; (1997) https://doi.org/10.1117/12.628227
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany
A theoretical model for laser cleaning of microparticles from solid surface was established by taking adhesion force and cleaning force into account. The threshold fluence can be obtained from this model and verified by the experimental results. It was found that laser irradiation from the reverse side of transparent substrate is more effective to remove particles than that from the front side. Laser irradiation with shorter wavelength can result in higher cleaning efficiency and lower threshold fluence for removal of particles from solid surfaces. Keywords: Laser cleaning, microparticles, Van der Waals force, cleaning force, cleaning threshold
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongfeng Lu, Yongfeng Lu, Wen Dong Song, Wen Dong Song, Minghui Hong, Minghui Hong, Daniel S. H. Chan, Daniel S. H. Chan, Tohsiew Low, Tohsiew Low, } "Laser cleaning of microparticles: theoretical prediction of threshold laser fluence", Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); doi: 10.1117/12.628227; https://doi.org/10.1117/12.628227


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