17 September 1997 Comparison of the moire two-beam phase-stepping and Fourier transform method techniques in Fizeau interferometry
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Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281167
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany
Abstract
We have previously proposed a phase evaluation method of multiple-beam Fizeau patterns that combines the two-beam phase-stepping algorithms with the more effect. This method is based on a multiplicative moire image formation process obtained y the direct superposition of high-frequency multiple-beam Fizeau carrier fringes on a transmission grating. In this paper the contrast between this Moire two- beam phase-stepping technique and the direct evaluation of the high-frequency multiple-beam Fizeau carrier fringes by means of the Fourier Transform Method is presented.
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Benito Vasquez Dorrio, Jose Carlos Lopez Vazquez, Jose M. Alen, J. Bugarin, Antonio Fernandez, Angel F. Doval, Jesus Blanco-Garcia, Mariano Perez-Amor, J. L. Fernandez, "Comparison of the moire two-beam phase-stepping and Fourier transform method techniques in Fizeau interferometry", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281167; https://doi.org/10.1117/12.281167
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