Crossed data processing in spectrally resolved white-light interferometry

Carmen Sainz; Antonio L. Guerrero

doi:10.1117/12.281210

17 September 1997 Crossed data processing in spectrally resolved white-light interferometry

Carmen Sainz, Antonio L. Guerrero

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281210
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Spectrally resolved white-light interferometry has proved to be an absolute and precise tool for measuring optical delays. Hitherto, the bidimensional interferogram in the hybrid spatial-spectral domain, has been processed row by row as function of (sigma) , in order to obtain the map of the optical delay (Delta) (y). In this way, nanometric precision is obtained in profilometric studies. In this paper we show that more information an be obtained from the same interferogram when it is additionally processed column by column. This corresponds to the analysis of a sequence of monochromatic interferograms which are free from the classical ambiguities in the phase, since the preliminary row-by-row data processing along the spectral axis removed them. The absolute phase function thus obtained for each column at constant (sigma) yields the profile z(y). Statistical treatment of the overall information provided by this row by row plus column by column data processing increases precision in one order of magnitude. This paper presents the method and experimental results as well.

Citation Download Citation

Carmen Sainz and Antonio L. Guerrero "Crossed data processing in spectrally resolved white-light interferometry", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281210

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KEYWORDS

Data processing

Interferometry

CCD cameras

Visibility

Cameras

Error analysis

Fringe analysis

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