17 September 1997 Microelectromechanical systems (MEMS) and their photonic application
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Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281182
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany
Abstract
THe fabrication of tunable optical devices by using Si free- space micro-optics and Ni micromirrors has demonstrated the applicability of MEMS technologies to photonic devices. Compact, multi-functional, assembly-free, micro-optical systems have been developed by using MEMS technologies to integrate optical devices and micromechanics onto the same wafer. A high aspect-ratio Si plate which works as a beam splitter has been fabricated using Si micromachining. A tunable laser diode with an external Si mirror has been fabricated and shown to have wavelength tunability. A Ni micromirror with comb-drive actuator has been developed and applied it to both a tunable optical filter and a tunable laser diode. Due to the precise motion of the micromirror, accurate optical tunability has been obtained.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuji Uenishi, Yuji Uenishi, Koji Akimoto, Koji Akimoto, Shinji Nagaoka, Shinji Nagaoka, } "Microelectromechanical systems (MEMS) and their photonic application", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281182; https://doi.org/10.1117/12.281182
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