17 September 1997 Original approach to an optically active silicon-based interferometric structure for sensing applications
Author Affiliations +
Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281184
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany
Abstract
As a novelty application of Si-based integrated optics, the results of realization of a compact Mach-Zehnder interferometer will be presented. The deposition of a ZnO thin-film transducer on the reference arm of the interferometer will allow to transform this optically passive device in a device under an active sinusoidal phase modulation.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christophe Gorecki, Christophe Gorecki, Eric Bonnotte, Eric Bonnotte, Hiroshi Toshioshi, Hiroshi Toshioshi, Fred Benoit, Fred Benoit, Hideki Kawakatsu, Hideki Kawakatsu, Hiroyuki Fujita, Hiroyuki Fujita, } "Original approach to an optically active silicon-based interferometric structure for sensing applications", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281184; https://doi.org/10.1117/12.281184
PROCEEDINGS
8 PAGES


SHARE
Back to Top