24 September 1997 Electrically tunable NIR spectrometer
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The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kimmo Keraenen, Kimmo Keraenen, Pentti Karioja, Pentti Karioja, Outi Rusanen, Outi Rusanen, Jussi Tenhunen, Jussi Tenhunen, Martti Blomberg, Martti Blomberg, Heikki Lehto, Heikki Lehto, "Electrically tunable NIR spectrometer", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281225; https://doi.org/10.1117/12.281225

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