24 September 1997 High-resolution self-diffractive adaptive element for remote displacement sensing
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A new conception of adaptive, high resolution, selfdiffractive microsensor for remote displacement measurements is presented. The sensor is sensitive in 3D space and can provide in-plane and out-of-plane displacements simultaneously and separately.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George Eugene Dovgalenko, George Eugene Dovgalenko, William T. Springer, William T. Springer, } "High-resolution self-diffractive adaptive element for remote displacement sensing", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281226; https://doi.org/10.1117/12.281226


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