24 September 1997 Hybrid coupling of laser light sources to silicon (oxy) nitride-based waveguides
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An efficient method was developed to couple a diode laser to a high contrast waveguides. The laserdiodes were mounted with sub-micron precision using a thermocompression mounting technique. An AlGaAs ((lambda) equals 850 nm) laserdiode was coupled to a SiON based slab waveguide (efficiency (eta) EQ 25 - 30%) and to a Si2N4 based ridge waveguide (efficiency (eta) equals 20%) on silicon. A start has been made with the determination of the lifetime of thermocompression mounted laserdiodes. AlGaAs ((lambda) equals 850 nm) lasers as well as AlGaInP ((lambda) equals 675 nm) lasers were tested. The first results indicate that lifetimes in the range 10 - 30 years are possible for CW operation at 30 degree(s)C. The laser- waveguide coupling technique is demonstrated in a sensor platform.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. J. T. de Krijger, A. J. T. de Krijger, Herman H. P. Th. Bekman, Herman H. P. Th. Bekman, } "Hybrid coupling of laser light sources to silicon (oxy) nitride-based waveguides", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281219; https://doi.org/10.1117/12.281219

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