Method for improving performance of IR focal plane array using microlens array

Chunlei Du; Lurong Guo; Y. R. Wang; Lishu Zhou; G. L. Sun; Jin Zhang; X. D. Lin; Z. Li; Zhongbi Zhou

doi:10.1117/12.281214

24 September 1997 Method for improving performance of IR focal plane array using microlens array

Chunlei Du, Lurong Guo, Y. R. Wang, Lishu Zhou, G. L. Sun, Jin Zhang, X. D. Lin, Z. Li, Zhongbi Zhou

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281214
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

An experiment which a diffractive microlens array on germanium is used for enhancing the fill factor of infrared focal plane array has been described in this paper. In order to achieve higher effective fill factor, the diffractive efficiency of each microlens and the transmissivity of the final element must be emphasized. The fabrication and the anti-reflection film evaporation for the diffractive microlens array have been studied. Based on a precise mechanics we have designed, a coupling experiment has been done and the main performance has been discussed. The fill factor of 80% is expected to be reached for the detector with original fill factor of 25%.

Citation Download Citation

Chunlei Du, Lurong Guo, Y. R. Wang, Lishu Zhou, G. L. Sun, Jin Zhang, X. D. Lin, Z. Li, and Zhongbi Zhou "Method for improving performance of IR focal plane array using microlens array", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281214

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