24 September 1997 Micromachined aperture probe tip for multifunctional scanning probe microscopy
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The paper presents a new concept of a micromachined integrated sensor for combined atomic force/near field optical microscopy. The sensor consists of a microfabricated cantilever with an integrated waveguide and a transparent near field aperture tip. The advantage compared to the fiber based near field tips is the high reproducibility of the aperture and the control of the tip-sample distance by the AFM-channel. The aperture tip is fabricated in a reliable batch process which has the potential for implementation in micromachining processes of scanning probe microscopy sensors and therefore leads to new types of multifunctional probes. For evaluation purposes, the tip was attached to an optical fiber by a microassembly setup and subsequently installed in a near-field scanning optical microscope. First measurements of topographical and optical near-field patterns demonstrate the proper performance of the hybrid probe.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Abraham, Michael Abraham, Wolfgang Ehrfeld, Wolfgang Ehrfeld, Manfred Lacher, Manfred Lacher, Othmar Marti, Othmar Marti, Karsten Mayr, Karsten Mayr, Wilfried Noell, Wilfried Noell, Peter Guethner, Peter Guethner, Joachim Barenz, Joachim Barenz, } "Micromachined aperture probe tip for multifunctional scanning probe microscopy", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281234; https://doi.org/10.1117/12.281234

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