Novel method for fabricating microlens arrays

Lurong Guo; Bo Chen; Lin Pang; Chunlei Du; Zhongbi Zhou

doi:10.1117/12.281213

24 September 1997 Novel method for fabricating microlens arrays

Lurong Guo, Bo Chen, Lin Pang, Chunlei Du, Zhongbi Zhou

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281213
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

A novel method for fabricating microlens arrays (MLA) with continuous phase-relief has been proposed in this paper. It includes three main parts in details: obtaining continuous exposure on photolithographic materials by using moving mask method; fabricating continuous MLA on gelatin by enzyme treatment; replicating MLA to polymer by prepolymerize monomer injection molding techniques. The microlens has parabolic section profile and no dead area, it has the merits of high integration, high energy usage, and less chromatic aberration, especially is useful for broadband application. This method is fast and more convenient than binary optics method or laser direct writing techniques.

Citation Download Citation

Lurong Guo, Bo Chen, Lin Pang, Chunlei Du, and Zhongbi Zhou "Novel method for fabricating microlens arrays", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281213

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