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24 September 1997 Optical receiver module for very high bit rates
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A microoptical receiver module for very high bitrates was designed and realized. We employed well established silicon technologies for integrating the optical components of the microoptical system. For reducing the optical spot size on the photo diode due to the beam divergence of the transmission fiber a monolithically integrated silicon microlens was used. The microlenses were fabricated by melting of photoresist and transferring the preforms into the silicon substrate. We characterized the lenses by lateral shearing interferometry in transmission. The beam diameter on the photodetector (l/e2) could be reduced by about one order of magnitude to less than 10 micrometers . The sensitivity of the modules was about 0.5 A/W at 1310 nm and 0.6 A/W at 1550 nm.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lars Erdmann and Roland Mueller-Fiedler "Optical receiver module for very high bit rates", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997);

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