24 September 1997 Polymerized PMMA replication of micro-optics elements
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Abstract
A new method for replicating microoptics elements is presented. The principle and technological process of the method are introduced. For PMMA, deep binary relief gratings on quartz substrate and parabolic lenses array in gelatin on glass substrate are replicated by using this new method. The relief-transfer efficiency and transparency of the replicas are measured. The results show that the replicas are of high fidelity of profile.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lin Pang, Lurong Guo, Bo Chen, Hongjun Zeng, Jin Zhang, "Polymerized PMMA replication of micro-optics elements", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281216; https://doi.org/10.1117/12.281216
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