24 September 1997 Unidirectional waveguide grating coupling by means of parallelogrammic grooves
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Abstract
The blazing effect of parallelogramic grooves is analyzed theoretically and demonstrated experimentally in the case of TE and TM modes in large guidance waveguides. A novel fabrication method is proposed, modellized and demonstrated.
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Alexandre V. Tishchenko, Nikolay M. Lyndin, S. M. Loktev, Vladimir A. Sychugov, Boris A. Usievich, Olivier M. Parriaux, "Unidirectional waveguide grating coupling by means of parallelogrammic grooves", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281236; https://doi.org/10.1117/12.281236
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KEYWORDS
Waveguides

Etching

Photoresist materials

Metals

Waveguide modes

Ion beams

Aluminum

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