Use of diffracting optics in metrology and sensing

Michael C. Hutley; Richard F. Stevens

doi:10.1117/12.281238

24 September 1997 Use of diffracting optics in metrology and sensing

Michael C. Hutley, Richard F. Stevens

Author Affiliations +

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281238
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Diffracting optical components possess certain features that differ from reflecting or refracting optics. We discuss how these properties arise and illustrate how they may be used to advantage in metrology and sensing.

Citation Download Citation

Michael C. Hutley and Richard F. Stevens "Use of diffracting optics in metrology and sensing", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281238

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