22 September 1997 Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region
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Proceedings Volume 3110, 10th Meeting on Optical Engineering in Israel; (1997) https://doi.org/10.1117/12.281375
Event: 10th Meeting on Optical Engineering in Israel, 1997, Jerusalem, Israel
Abstract
Effects of defect propagation from the substrate throughout thin film single layer and multilayer coatings are investigated on fluoride and oxide films evaporated onto different types of substrates. Atomic force microscopy, light scattering methods, and transmission electron microscopy are used to study the surface morphology of the coated and uncoated substrates. With fluoride films, propagation of rough substrate structures is observed for both single layer films and multilayers. Oxide coatings replicate the microtopography even of well polished surfaces and throughout thick multilayer stacks.
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Angela Duparre, Angela Duparre, Stefan Jakobs, Stefan Jakobs, Norbert Kaiser, Norbert Kaiser, } "Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region", Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); doi: 10.1117/12.281375; https://doi.org/10.1117/12.281375
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