11 July 1997 Ion-beam polishing of electroless nickel masters for x-ray replication optics
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The production of future high throughput x-ray telescopes optics using a replication method foresees the use of a high number of mandrels and a tight control of their shape. The proposed ion beam polishing of the mandrels is a technique that is either cost effective and offers accurate shape control. The aluminum-kanigen coated mandrels are initially diamond turned, superpolished to the required microroughness and then figured with ion beam polishing. An ion beam facility has been built to test the concept. After the characterization of the source, samples of superpolished electroless nickel have been ion polished. The behavior of the material and the degradation of its microroughness after the etching have been investigated and the results are here reported.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mauro Ghigo, Mauro Ghigo, P. Cerutti, P. Cerutti, Oberto Citterio, Oberto Citterio, Paolo Conconi, Paolo Conconi, Francesco Mazzoleni, Francesco Mazzoleni, "Ion-beam polishing of electroless nickel masters for x-ray replication optics", Proc. SPIE 3113, Grazing Incidence and Multilayer X-Ray Optical Systems, (11 July 1997); doi: 10.1117/12.278863; https://doi.org/10.1117/12.278863

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