Paper
15 October 1997 Quantum efficiency measurement on a CCD detector in the 0.3- to 1100-nm spectral region
Luca Poletto, Alessio Boscolo, Maria-Guglielmina Pelizzo, Leonardo Placentino, Giuseppe Tondello
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Abstract
The performances of a CCD have been evaluated in a very wide spectral region, which comprises near IR, visible, near and far UV, EUV and soft x-ray spectral regions. The CCD detector is a back illuminated one, 512 by 512 format, 24 by 24 micrometer squared pixel. The performed measurements consist mainly on the determination of the quantum efficiency in the 0.3 - 1100 nm (4.5 keV - 1 eV) spectral region. Three different experimental setup have been used: a Czerny-Turner monochromator for the 1100 - 250 nm region, a Johnson-Onaka monochromator for the 250 - 30 nm region, and a grazing incidence Rowland monochromator for the 25 - 0.3 nm region. The tested CCD exhibits high values of quantum efficiency in the analyzed spectral range, representing a very useful detector of radiation in the extended optical domain.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Luca Poletto, Alessio Boscolo, Maria-Guglielmina Pelizzo, Leonardo Placentino, and Giuseppe Tondello "Quantum efficiency measurement on a CCD detector in the 0.3- to 1100-nm spectral region", Proc. SPIE 3114, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, (15 October 1997); https://doi.org/10.1117/12.283796
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Cited by 3 scholarly publications.
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KEYWORDS
Quantum efficiency

Charge-coupled devices

Photodiodes

Sensors

Calibration

CCD image sensors

Extreme ultraviolet

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