15 October 1997 Single-photon avalanche detectors for low-light-level imaging
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Linear arrays of single photon avalanche detectors (SPADs) designed for use in low light level imaging applications were fabricated using a novel planar process that is compatible with standard CMOS technology. The device characteristics for these arrays are presented here to investigate their suitability for high efficiency low light level imaging. A new scheme is proposed to eliminate the problem of optical crosstalk between pixels in the array by introducing a trench isolation process coupled with silicon-on-insulator (SOI) technology.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alan P. Morrison, Alan P. Morrison, Vasileios S. Sinnis, Vasileios S. Sinnis, Alan Mathewson, Alan Mathewson, Franco Zappa, Franco Zappa, Laura Varisco, Laura Varisco, Massimo Ghioni, Massimo Ghioni, Sergio D. Cova, Sergio D. Cova, } "Single-photon avalanche detectors for low-light-level imaging", Proc. SPIE 3114, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, (15 October 1997); doi: 10.1117/12.278896; https://doi.org/10.1117/12.278896


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