3 October 1997 Bidirectional ellipsometry and its application to the characterization of surfaces
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Abstract
The polarization of light scattered out of the pane of incidence was measured from rough and microrough silicon, polished fused silica and glass ceramic, and ground and polished black glass. The measurement defects, demonstrating that the polarization light can be used to distinguish between microroughness and subsurface defects.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas A. Germer, Clara C. Asmail, "Bidirectional ellipsometry and its application to the characterization of surfaces", Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); doi: 10.1117/12.278968; https://doi.org/10.1117/12.278968
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