3 October 1997 Four-port Fabry-Perot/Michelson interferometer: polarization-dependent response and ellipsometry
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Abstract
The com;lex amplitude reflection and transmission coefficients for the p and s polarizations at oblique incidence are determined for a four-port solid-substrate Fabry-Perot/Michelson interferometer. The amplitude response for each of the two reflected and two transmitted waves is considered as a function of the angle of incidence and optical path length. Incidence angles for maximum back reflection and maximum back transmission are noted for both polarizations. The presence of multiple ports enables four ellipsometric functions to be measured simultaneously, which is desirable for the accurate and unambiguous characterization of deposited thin films. Results are presented for reflection and transmission ellipsometry of a growing transparent MgF2 film on the planar entrance face of a ZnS-prism interferometer.
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Rasheed M. A. Azzam, Rasheed M. A. Azzam, M. Nazim Uddin, M. Nazim Uddin, } "Four-port Fabry-Perot/Michelson interferometer: polarization-dependent response and ellipsometry", Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); doi: 10.1117/12.278980; https://doi.org/10.1117/12.278980
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