Mueller-matrix ellipsometry: a review

Rasheed M. A. Azzam

doi:10.1117/12.283870

3 October 1997 Mueller-matrix ellipsometry: a review

Rasheed M. A. Azzam

Proceedings Volume 3121, Polarization: Measurement, Analysis, and Remote Sensing; (1997) https://doi.org/10.1117/12.283870
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Techniques for the partial or complete determination of the Mueller matrix of elastic light scattering by a given samples are reviewed. Important developments include several implementations and applications of the dual-rotating- retarder Mueller-matrix ellipsometer and the addition of imaging, scanning, and spectroscopic capabilities. The use of a multi-channel division-of-amplitude photopolarimeter as a polarization state detector, and the propose modulation of the polarization state generator have substantially increased the efficiency and speed with which the full Mueller matrix can be measured.

Citation Download Citation

Rasheed M. A. Azzam "Mueller-matrix ellipsometry: a review", Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); https://doi.org/10.1117/12.283870

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