3 October 1997 Phase-shifting interferometric imaging ellipsometer
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Abstract
An imaging ellipsometer has been developed which employs phase shifting interferometry to characterize the ellipsometric parameters. Polarized light from a laser or incoherent source is collimated and reflected off of the surface under test. A modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states. Subtraction of the phases in the two interferograms yields the ellipsometric parameter (Delta) . The fringe modulation of the two interferograms is used to calculate the ellipsometric parameter (Psi) . The instrument uses imaging optics to image the surface under test to a CCd, yielding a truly two dimensional ellipsometric measurement. The deign of the instrument and result of measurement will be presented.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Conrad Wells, Conrad Wells, James C. Wyant, James C. Wyant, } "Phase-shifting interferometric imaging ellipsometer", Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); doi: 10.1117/12.283853; https://doi.org/10.1117/12.283853
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