23 October 1997 Pyroelectric infrared arrays and their applications
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Abstract
For different applications the use of uncooled thermal infrared detectors is often a low-cost alternative to the cooled semiconductor detectors. By the development of a large number of novel detector technologies the thermal and spatial resolution ofthe thermal detectors could be improved considerably. On the basis of the pyroelectric material lithium tantalate (LiTaO3) a cheap and flexible detector technology was developed for the design and manufacturing of user-specific arrays even at small batch quantities. The possibilities of this technology are described by the example of newly developed linear arrays with 128 responsive elements of different sizes (pitch 100 i.tm) and 256 responsive elements (pitch 50 jtm) as well as a two-dimensional array with 16 x 8 responsive elements. The given detector properties ofthe arrays clearly show that the achieved detector properties meet the demands of many applications. Responsive elements having a thickness of less than 5 jtm can be produced by the use of ion-beam etching for the stmcturing ofthe pyroelectric chips. In connection with a low-noise CMOS read-out circuit, NEP-values lower than 1 .5 nW were obtained by it at a chopping frequency of 128 Hz. The effective capacity of the detectors is illustrated on the basis of two detector applications in devices for the twodimensional temperature measurement and in a spectrometer. Keywords: infrared, uncooled detector, pyroelectric, array, manufacturing, properties, thermal imaging, spectrometer
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Volkmar Norkus, Volkmar Norkus, Torsten Sokoll, Torsten Sokoll, Gerald Gerlach, Gerald Gerlach, Guenter Hofmann, Guenter Hofmann, "Pyroelectric infrared arrays and their applications", Proc. SPIE 3122, Infrared Spaceborne Remote Sensing V, (23 October 1997); doi: 10.1117/12.292702; https://doi.org/10.1117/12.292702
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