17 October 1997 Prototype bimorph mirror developed for the AAT adaptive optics system
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Proceedings Volume 3126, Adaptive Optics and Applications; (1997); doi: 10.1117/12.279048
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States
Bimorph mirrors consist of two layers of piezo-electric ceramic glued together with an electrode pattern between them. They present an inexpensive alternative to more conventional deformable mirrors used in adaptive optics which use discrete piezoelectric actuators. The main technical question in bimorph production is how to produce a high quality mirror surface. Several methods have been tried, including direct polishing of the piezo ceramic and application of replicated surfaces. A prototype bimorph mirror has been developed for the Anglo-Australian Telescope Adaptive Optics system. It uses a layer of silicon dioxide deposited onto the piezo substrate and then polished and coated with silver. This production technique is discussed along with the characteristics of the resulting mirror as determined using a WYKO laser interferometer.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huawei Zhao, Pal W. Fekete, John W. O'Byrne, "Prototype bimorph mirror developed for the AAT adaptive optics system", Proc. SPIE 3126, Adaptive Optics and Applications, (17 October 1997); doi: 10.1117/12.279048; https://doi.org/10.1117/12.279048



Surface finishing

Adaptive optics


Semiconducting wafers


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