7 July 1997 Scanning and rotating micromirrors using thermal actuators
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Abstract
This paper reports on micromachined polysilicon scanning and rotating micromirrors and the development of a CMOS drive system. The micromirrors described in this research were developed at the Air Force Institute of Technology and fabricated using the DARPA-sponsored multi-user MEMS processes (MUMPs). The scanning micromirror is connected to the substrate using micro-hinges. This allows the mirror plate to rotate off the substrate surface and lock into a support mechanism. The angle between the scanning mirror and the substrate is modulated by driving the mirror with a thermal actuator array through a range of 20 degrees. For the rotating mirror, the mirror plate is attached to the substrate by three floating substrate hinges connected to a rotating base. Actuator arrays are also used to position the rotating mirror. A computer controlled electrical interface was developed which automates the positioning of both the scanning and rotating mirrors. The low operating voltages of the micromirror positioning mechanism makes the use of CMOS technology attractive; and the development of a digital interface allows for flexible operation of the devices. These designs are well suited for micro-optical applications such as optical scanners, corner cube reflectors, and optical couplers where electrical positioning of a mirror is desired.
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Jeffrey T. Butler, Victor M. Bright, J. Robert Reid, "Scanning and rotating micromirrors using thermal actuators", Proc. SPIE 3131, Optical Scanning Systems: Design and Applications, (7 July 1997); doi: 10.1117/12.277741; https://doi.org/10.1117/12.277741
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KEYWORDS
Actuators

Mirrors

Micromirrors

Control systems

Modulation

Human-machine interfaces

Microelectromechanical systems

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