Paper
13 October 1997 Analysis of high-precision optical positioning systems for vibration stability at the advanced photon source
Ipek Basdogan, Thomas J. Royston, Ahmed A. Shabana, Juan Barraza Jr., Deming Shu, Tuncer M. Kuzay
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Ipek Basdogan, Thomas J. Royston, Ahmed A. Shabana, Juan Barraza Jr., Deming Shu, and Tuncer M. Kuzay "Analysis of high-precision optical positioning systems for vibration stability at the advanced photon source", Proc. SPIE 3132, Optomechanical Design and Precision Instruments, (13 October 1997); https://doi.org/10.1117/12.284083
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KEYWORDS
Systems modeling

Motion models

Optical benches

Synchrotron radiation

Cooling systems

Optical components

Finite element methods

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