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13 October 1997 Surface figuring of silicon carbide using chemical etching methodologies
Douglas L. Hibbard, Steven J. Hoskins, Evan C. Lundstedt
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Douglas L. Hibbard, Steven J. Hoskins, and Evan C. Lundstedt "Surface figuring of silicon carbide using chemical etching methodologies", Proc. SPIE 3132, Optomechanical Design and Precision Instruments, (13 October 1997); https://doi.org/10.1117/12.284076
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KEYWORDS
Silicon carbide

Etching

Surface finishing

Wet etching

Polishing

Mirrors

Plasma

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