13 October 1997 Surface figuring of silicon carbide using chemical etching methodologies
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Douglas L. Hibbard, Douglas L. Hibbard, Steven J. Hoskins, Steven J. Hoskins, Evan C. Lundstedt, Evan C. Lundstedt, } "Surface figuring of silicon carbide using chemical etching methodologies", Proc. SPIE 3132, Optomechanical Design and Precision Instruments, (13 October 1997); doi: 10.1117/12.284076; https://doi.org/10.1117/12.284076


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