1 October 1997 Structure evolution of stratified NdF3 optical thin films
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Abstract
The structure evolution characteristics of single and stratified NdF3 optical thin films on amorphous quartz substrates have been investigated by cross sectional transmission electron microscopy, x-ray diffractometer measurements and atomic force microscopy. The films were deposited by physical vapor deposition under ultra high vacuum conditions. The morphology changes with substrate temperature from V shaped columnar (Zone T) to a columnar morphology corresponding to zone II. The zone boundary falls in the range above 300 °C. The surface roughness of the single films is lowest at 300 °C substrate temperature. The main texture components are <111<, <1 13< and <001< respectively for the three single films of increasing substrate temperature. The surface roughness is decreased by the stratification. The grain size is increased by stratification with CaF2 and decreased by stratification with MgF2 compared to the grain size ofthe single film at the same substrate temperature. Keywords: thin film, stratification, morphology, texture, surface roughness, extinction
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Miklos Adamik, Miklos Adamik, I. Tomov, I. Tomov, Ute Kaiser, Ute Kaiser, Sven Laux, Sven Laux, Carsten Schmidt, Carsten Schmidt, W. Richter, W. Richter, G. Safran, G. Safran, P. B. Barna, P. B. Barna, } "Structure evolution of stratified NdF3 optical thin films", Proc. SPIE 3133, Optical Thin Films V: New Developments, (1 October 1997); doi: 10.1117/12.290187; https://doi.org/10.1117/12.290187
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