1 November 1997 Applications of the rapidly renewable lap
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Proceedings Volume 3134, Optical Manufacturing and Testing II; (1997); doi: 10.1117/12.295130
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States
Abstract
The rapidly renewable lap is based on the simple concept of generating the figure needed in a lap substrate and then replicating it into a thin film slumped over the substrate. Based on this concept, we describe how efficient laps can be constructed for the lapping and polishing of crystalline, amorphous, and metallic surfaces.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert E. Parks, Christopher J. Evans, David J. Roderick, John A. Dagata, "Applications of the rapidly renewable lap", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295130; https://doi.org/10.1117/12.295130
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KEYWORDS
Polishing

Diamond

Surface finishing

Silicon

Silicon carbide

Glasses

Silicon films

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