1 November 1997 Fringe modulation characterization for a phase-shifting imaging ellipsometer
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Abstract
An imaging ellipsometer has been developed which employs phase shifting interferometry to characterize the ellipsometric parameters. A modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states. Subtraction of the phases in the two interferograms yields the ellipsometric parameter (Delta) . The fringe modulation of the two interferograms is used to calculate the ellipsometric parameter (Psi) . The characterization of the average intensity of the interferogram is the largest contributor to the errors in the modulation. New algorithms for reducing the errors in modulation calculations for phase shifting interferometry are presented. The deign of the instrument, results of measurements and algorithms for modulation characterization will be presented.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Conrad Wells, Conrad Wells, James C. Wyant, James C. Wyant, "Fringe modulation characterization for a phase-shifting imaging ellipsometer", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295148; https://doi.org/10.1117/12.295148
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