1 November 1997 Hartmann sensors for optical testing
Author Affiliations +
Abstract
The modern Hartmann sensor provides a geometric measurement of wavefront as opposed to an interferometric measurement. Thus, it is free of some of the constraints of interferometry such as the requirements for vibration isolation, source coherence, and a reference source. Hartmann sensor configurations are presented which demonstrate the versatility of this technique while providing wavefront evaluation accuracy and sensitivity comparable to interferometry. There is a discussion of system alignment and operation as well as a discussion of software requirements.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert J. Zielinski, Robert J. Zielinski, Bruce Martin Levine, Bruce Martin Levine, Brian McNeil, Brian McNeil, } "Hartmann sensors for optical testing", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295142; https://doi.org/10.1117/12.295142
PROCEEDINGS
9 PAGES


SHARE
Back to Top