Hartmann sensors for optical testing

Robert J. Zielinski; Bruce Martin Levine; Brian McNeil

doi:10.1117/12.295142

1 November 1997 Hartmann sensors for optical testing

Robert J. Zielinski, Bruce Martin Levine, Brian McNeil

Author Affiliations +

Proceedings Volume 3134, Optical Manufacturing and Testing II; (1997) https://doi.org/10.1117/12.295142
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The modern Hartmann sensor provides a geometric measurement of wavefront as opposed to an interferometric measurement. Thus, it is free of some of the constraints of interferometry such as the requirements for vibration isolation, source coherence, and a reference source. Hartmann sensor configurations are presented which demonstrate the versatility of this technique while providing wavefront evaluation accuracy and sensitivity comparable to interferometry. There is a discussion of system alignment and operation as well as a discussion of software requirements.

Citation Download Citation

Robert J. Zielinski, Bruce Martin Levine, and Brian McNeil "Hartmann sensors for optical testing", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); https://doi.org/10.1117/12.295142

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