1 November 1997 Metrology of LIGO Pathfinder optics
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Abstract
Metrology procedures for determining the power, astigmatism, low and high spatial frequency variations in the surface profile on flat and curved optical surfaces are described. The procedures are applied to the characterization of optics produced for the Pathfinder program of the laser interferometer gravitational observatory and demonstrate that in the case of low spatial frequency surface errors measured by optical interferometry, measurements to a resolution down to (lambda) /2000 are possible in the measurement of the standard deviation of surface variations.
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David I. Farrant, David I. Farrant, Achim J. Leistner, Achim J. Leistner, Bozenko F. Oreb, Bozenko F. Oreb, Mark A. Suchting, Mark A. Suchting, Christopher J. Walsh, Christopher J. Walsh, } "Metrology of LIGO Pathfinder optics", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.279140; https://doi.org/10.1117/12.279140
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