1 November 1997 Online measurement system for monitoring ring tool misalignments
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Abstract
A new metrology technique was developed for on-line tool misalignment detection. It is an image based metrology system. It measures surface slope functions from the captured reflected image off the test surface. The measured surface slope function is then used to determine the corresponding tool misalignments in the ring grinding setup for the Opticam surface generator. A prototype detection system was built and tested on-line in the Opticam machine. The experimental results are presented in this paper.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tong Xie, Tong Xie, John E. Greivenkamp, John E. Greivenkamp, } "Online measurement system for monitoring ring tool misalignments", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295150; https://doi.org/10.1117/12.295150
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