1 November 1997 Results of the calibration of interferometer transmission flats for the LIGO Pathfinder optics
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Abstract
To certify compliance with the exceptional surface figure requirements of the laser interferometer gravity observatory, Hughes Danbury Optical Systems developed a unique high-accuracy metrology capability consisting of a custom 12 inch phase-measuring interferometer and an absolute calibration algorithm. The interferometer was specifically designed to minimize systematic retrace, phase- modulation, and ghost reflection errors. The calibration algorithm extends existing three-flat methods by employing circular harmonic transforms. Using this capability, three flats were calibrated over a 200 mm clear aperture to an accuracy of better than (lambda) /1000 rms. Comparisons with published algorithms are presented.
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Robert Paul Bourgeois, Robert Paul Bourgeois, Joann Magner, Joann Magner, H. Philip Stahl, H. Philip Stahl, } "Results of the calibration of interferometer transmission flats for the LIGO Pathfinder optics", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295121; https://doi.org/10.1117/12.295121
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