1 November 1997 Self-mixing type of phase-locked laser diode interferometer
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Abstract
A new type of phase-locked laser diode interferometer which uses self-mixing interference in the optical system is described. The self-mixing interference signal is obtained easily by the optical feedback or feeding back laser beam from the object to the laser diode. The interference signal can be detected by a photodiode which is in the package of the LD. Therefore, a beam splitter, reference mirror and external photodetector are not required, and a kind of interference signal is obtained by a simple optical system. But the signal is not the same as that which is obtained in a conventional interferometer. We used the phase-locked technique to measure the phase change in the self-mixing interference signal. This technique enables us to detect the displacement of an object. We describe our principle, experimental setup, and experimental results.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takamasa Suzuki, Shigeyuki Hirabayashi, Osami Sasaki, Takeo Maruyama, "Self-mixing type of phase-locked laser diode interferometer", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.279138; https://doi.org/10.1117/12.279138
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