Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement

Angela Duparre; Stefan Gliech

doi:10.1117/12.287805

26 September 1997 Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement

Angela Duparre, Stefan Gliech

Author Affiliations +

Proceedings Volume 3141, Scattering and Surface Roughness; (1997) https://doi.org/10.1117/12.287805
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

An apparatus for total integrated backscattering measurement is described that operates in the UV to IR spectral region. Background levels smaller than 0.1 ppm at 633 nm have been achieved. During the measurement, the sample surface is scanned automatically, yielding one- or two-dimensional scattering diagrams. From the latter, small defects on supersmooth surfaces can be localized. Results are reported of measurements on samples with different surface qualities such as supersmooth Si-wafers with sub-angstrom roughness, CaF₂ substrates, thin film optical coatings and rough engineering surfaces. The equipment is involved in standardization project ISO/CD 13696'.

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Angela Duparre and Stefan Gliech "Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement", Proc. SPIE 3141, Scattering and Surface Roughness, (26 September 1997); https://doi.org/10.1117/12.287805

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