Scanning scattering microscope for surface and buried interface roughness and defect imaging

Jan Lorincik; Joseph Fine; Greg Gillen

doi:10.1117/12.279242

26 September 1997 Scanning scattering microscope for surface and buried interface roughness and defect imaging

Jan Lorincik, Joseph Fine, Greg Gillen

Proceedings Volume 3141, Scattering and Surface Roughness; (1997) https://doi.org/10.1117/12.279242
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A scanning-mode microfocused total integrated scatter (TIS) instrument, the scanning scattering microscope (SSM), can produce two-dimensional images of very small surface and subsurface features and of variations in surface and buried interface roughness. In its present configuration, the lateral resolution is approximately 10 micrometer and the minimal detectable rms-roughness is 0.05 nm (with a bandwidth of 0.096 micrometer^-1 to 1.56 micrometer^-1). The performance of the SSM has been demonstrated using calibration gratings, Ge samples and ultra-smooth Si(100) and SiO₂/Si(100) samples. Intercomparison has also been made with atomic force microscope (AFM) measurements. The results indicate that this scanned optical technique is a very sensitive, non-contact optical method for evaluating surface microroughness. Our measurements also indicate that in some cases, e.g. for ultrathin (less than 10 nm) SiO₂ on Si, this optical method can be used to directly image microroughness of buried interfaces. Due to the small beam spot size, compared to a standard TIS, the SSM is applicable to the TIS measurements of rms roughness of small areas (of submillimeter diameter), e.g. craters made by secondary ion mass spectrometry (SIMS) techniques.

Citation Download Citation

Jan Lorincik, Joseph Fine, and Greg Gillen "Scanning scattering microscope for surface and buried interface roughness and defect imaging", Proc. SPIE 3141, Scattering and Surface Roughness, (26 September 1997); https://doi.org/10.1117/12.279242

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