24 October 1997 Developments in limited data image reconstruction techniques for ultrahigh-resolution x-ray tomographic imaging of microchips
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Abstract
The use of soft x-ray nanotomography techniques for the evaluation and failure mode analysis of microchips was investigated. Realistic numerical simulations of the imaging process were performed and a specialized approach to image reconstruction from limited projection data was devised. Prior knowledge of the structure and its component materials was used to eliminate artifacts in the reconstructed images so that defects and deviations from the original design could be visualized. Simulated data sets wee generated with a total of 21 projections over three different angular ranges: -50 to +50, -80 to +80 and -90 to +90 degrees. In addition, a low level of illumination was assumed. It was shown that sub-micron defects within one cell of a microchip could be imaged in 3D using such an approach.
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Waleed S. Haddad, Waleed S. Haddad, James E. Trebes, James E. Trebes, "Developments in limited data image reconstruction techniques for ultrahigh-resolution x-ray tomographic imaging of microchips", Proc. SPIE 3149, Developments in X-Ray Tomography, (24 October 1997); doi: 10.1117/12.292721; https://doi.org/10.1117/12.292721
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