Progress In Extreme Ultraviolet And Soft X-Ray Multilayer Coatings

Arno K. Hagenlocher

doi:10.1117/12.932997

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3 May 1982 Progress In Extreme Ultraviolet And Soft X-Ray Multilayer Coatings

Arno K. Hagenlocher

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Proceedings Volume 0315, Reflecting Optics for Synchrotron Radiation; (1982) https://doi.org/10.1117/12.932997
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

The deposition of multilayer coatings for reflective filters in the extreme UV region is controlled by measuring the reflection of soft x-rays during the coating process. The x-ray source is aligned for every layer at the angle at which the maximas and minimas coincide with the peaks and valleys of the standing wave of the filter. The accuracy of the positioning between source and substrate has to be better than 1/50 degrees.

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Arno K. Hagenlocher "Progress In Extreme Ultraviolet And Soft X-Ray Multilayer Coatings", Proc. SPIE 0315, Reflecting Optics for Synchrotron Radiation, (3 May 1982); https://doi.org/10.1117/12.932997

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