3 November 1997 Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications
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We report about the diffraction efficiencies of two new types of multilayer diffraction gratings, one of them being proposed for high spectral dispersion ability due to a high line density in the photon energy range around 90 eV, while the other is being proposed as a multilayer grating working in the water window spectral range around 470 eV at near normal incidence angles. For a 6600 L/mm sinusoidal interference grating coated with 18 Mo/Si doublelayers of d = 8.2 nm absolute diffraction efficiencies up to 11 % at a wavelength .\ = 13.2 nm were measured in each first diffraction order. A 2400 L/mm laminar grating was coated with 60 Ti/C bilayers of d = 2.2 nm for high efficiency in the water window spectral range near the Ti-L edge (.\ = 2.77 nm). For a similar Ti/C multilayer mirror refiectivities of 11 % were measured at a wavelength ) = 2.7 nm and an angle of incidence a = 59 deg. First order diffraction efficiencies of about 0.7 % were measured for the Ti/C multilayer grating.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ulf Kleineberg, Ulf Kleineberg, Hans-Juergen Stock, Hans-Juergen Stock, D. Menke, D. Menke, O. Wehmeyer, O. Wehmeyer, Ulrich Heinzmann, Ulrich Heinzmann, Detlef Fuchs, Detlef Fuchs, Peter Bulicke, Peter Bulicke, Marco Wedowski, Marco Wedowski, Gerhard Ulm, Gerhard Ulm, Klaus F. Heidemann, Klaus F. Heidemann, K. Osterried, K. Osterried, } "Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications", Proc. SPIE 3150, Gratings and Grating Monochromators for Synchrotron Radiation, (3 November 1997); doi: 10.1117/12.283980; https://doi.org/10.1117/12.283980

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