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1 November 1997 Fabrication and metrology of high-quality synchrotron mirrors in the sub-arcsec regime
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This contribution focuses on the fabrication and metrology of various synchrotron radiation (SR) mirrors and grating substrates at Carl Zeiss. Due to the increased demand in high quality and high heat load SR optics new materials have entered the optical shop since the last few years. Currently the variety of materials ranges from ZerodurTM (a glass ceramic with a thermal expansion of approximately equals 0) through metals as Ni on Al to Silicon (Si) or even Silicon Carbide (SiC). Si is of special interest due to its thermal properties (expansion and conductivity) in high heat load application combined with its extremely low micro roughness of about 0.1 nm RMS and therefore low scattering contribution. Depending on the mirror geometry sub-arcsec quality with respect to the slope errors is achieved for all materials. The current length limit of the mirrors is about 1.5 m. In the paper accent is put on the metrology in the sub-arcsec regime (down to 0.1'). Special adapted software and evaluation strategies together with correct handling of the interface substrate/stylus of the metrology device are necessary to cope with the 0.1' mirror class. A review of recent fabrication results is given.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerhard Derst, Haiko Handschuh, Michael Schmidt, and K. Werner "Fabrication and metrology of high-quality synchrotron mirrors in the sub-arcsec regime", Proc. SPIE 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors, (1 November 1997);

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