Surface-figuring CVD-SiC mirrors with a five-axis-control ultraprecision grinding machine

Yoshiharu Namba; Hiroshi Suzuki

doi:10.1117/12.295565

1 November 1997 Surface-figuring CVD-SiC mirrors with a five-axis-control ultraprecision grinding machine

Yoshiharu Namba, Hiroshi Suzuki

Proceedings Volume 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors; (1997) https://doi.org/10.1117/12.295565
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A large 5-axis control ultraprecision grinding machine has been developed for making synchrotron-radiation mirrors with high accuracy. The positional and angular resolutions of the machine are 10 nm and 0.0002 degree, respectively. The dimensions of the machine are 3.3 m by 2.7 m by 4.4 m in height. The machine can generate non-axisymmetric aspheric surfaces on CVD-SiC material by a disc-type metal-bonded diamond wheel. An electric micrometer has been set near a grinding head for measuring the form error of ground surface in conformity with the machine movement due to the cutter location data. A series of the measured form errors corrects the former cutter location data automatically and the next grinding operation will be performed by the new cutter location data. A CVD-SiC material of 510 mm by 110 mm was ground into a toroidal surface of 750 nm in shape accuracy by the fifth grinding operation with the fourth correction of cutter location data. More than 99% of toroidal surface area have a form accuracy less than 500 nm. 3.3 nm rms surface roughness was obtained by the ultraprecision grinding using a SD4000N150M metal-bonded diamond wheel.

Citation Download Citation

Yoshiharu Namba and Hiroshi Suzuki "Surface-figuring CVD-SiC mirrors with a five-axis-control ultraprecision grinding machine", Proc. SPIE 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors, (1 November 1997); https://doi.org/10.1117/12.295565

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