In-lens deflectors for an LVSEM magnetic immersion objective lens

Yan Zhao; Anjam Khursheed

doi:10.1117/12.279403

25 September 1997 In-lens deflectors for an LVSEM magnetic immersion objective lens

Yan Zhao, Anjam Khursheed

Proceedings Volume 3155, Charged Particle Optics III; (1997) https://doi.org/10.1117/12.279403
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Two in-lens deflector arrangements integrated into a conical tip immersion objective lens are presented in this paper. One is of a saddle type placed on the inner-surface of the upper pole-piece close to the tip. Another is of a toroidal type integrated on the immersion objective lens by winding its coils around the upper pole-piece tip through small wire- passing holes. A nearly perfect moving objective lens (MOL) condition can be achieved with the saddle arrangement. The on- pole piece-tip toroidal deflector, although operating far from an ideal MOL condition, can also provide a wide field of view if certain parameters, such as the excitation current and the orientation angle, are chosen properly. At the optimum operation conditions, vertical landing of the probe can also be maintained.

Citation Download Citation

Yan Zhao and Anjam Khursheed "In-lens deflectors for an LVSEM magnetic immersion objective lens", Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); https://doi.org/10.1117/12.279403

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