Miniature scanning electron microscope design based upon the use of permanent magnets

Anjam Khursheed; John T. L. Thong; J. C. H. Phang; I. P. Ong

doi:10.1117/12.279395

25 September 1997 Miniature scanning electron microscope design based upon the use of permanent magnets

Anjam Khursheed, John T. L. Thong, J. C. H. Phang, I. P. Ong

Proceedings Volume 3155, Charged Particle Optics III; (1997) https://doi.org/10.1117/12.279395
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A table top SEM design has been presented which is based upon the use of permanent magnets. The SEM's height can be designed to be below 12 cm. Computer simulations predict that the SEM should be able to provide high spatial resolution and operate at primary beam voltages above 100 kV for thin specimens.

Citation Download Citation

Anjam Khursheed, John T. L. Thong, J. C. H. Phang, and I. P. Ong "Miniature scanning electron microscope design based upon the use of permanent magnets", Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); https://doi.org/10.1117/12.279395

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