25 September 1997 Nature of distortions of the surface pattern produced by precise electron-beam processing of insulators
Author Affiliations +
Abstract
The paper deals with the problems that appear in the electron- beam processing of insulators and consist in distortion of the surface pattern created by an electron beam. There are presented the results of theoretical and experimental studies on the phenomena in insulators, which are powered by the electron-beam processing of their surfaces, and the effect of these phenomena on the precision of the processing.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anatoly M. Filachev, Anatoly M. Filachev, Boris I. Fouks, Boris I. Fouks, Dmitrii E. Greenfeld, Dmitrii E. Greenfeld, } "Nature of distortions of the surface pattern produced by precise electron-beam processing of insulators", Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); doi: 10.1117/12.287815; https://doi.org/10.1117/12.287815
PROCEEDINGS
11 PAGES


SHARE
RELATED CONTENT

Optical systems based on electrowetting
Proceedings of SPIE (August 15 2004)
Research on solid electrochromic mirror
Proceedings of SPIE (October 02 1996)
Electron-beam-induced emission of electrons from insulators
Proceedings of SPIE (November 14 1999)
Charge transfer reactions in nematic liquid crystals
Proceedings of SPIE (October 13 1998)

Back to Top