14 October 1997 Debris-free laser plasma source using ice droplets
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Abstract
We describe the development of a laser-plasma source based on frozen water droplet targets which is essentially debris- free and capable of continuous, high-repetition-rate (> 1 kHz) operation. Created by modest (< 1 J) laser energies, this source produces copious emission at 13 nm and 11.6 nm, the preferred wavelengths for EUV projection lithography, with negligible target operation costs. Extension of this source to other wavelengths is considered.
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Martin C. Richardson, Martin C. Richardson, David Scott Torres, David Scott Torres, Christopher M. DePriest, Christopher M. DePriest, Feng Jin, Feng Jin, Gregory M. Shimkaveg, Gregory M. Shimkaveg, } "Debris-free laser plasma source using ice droplets", Proc. SPIE 3157, Applications of X Rays Generated from Lasers and Other Bright Sources, (14 October 1997); doi: 10.1117/12.283985; https://doi.org/10.1117/12.283985
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