Status Of The Zone Plate Microscope

G. Schmahl; D. Rudolph; B. Niemann

doi:10.1117/12.933140

24 March 1982 Status Of The Zone Plate Microscope

G. Schmahl, D. Rudolph, B. Niemann

Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933140
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

An X-ray microscope with a zone plate linear monochromator is described. A new micro zone plate for this microscope with one hundred zones was made. X-ray microscopy with synchrotron radiation has shown that a resolution in the 50 nm range has been achieved.

Citation Download Citation

G. Schmahl, D. Rudolph, and B. Niemann "Status Of The Zone Plate Microscope", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); https://doi.org/10.1117/12.933140

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